Inventor · disambiguated record

Xumou Xu

Also filed as: XU XUMOU

2 granted patents·7 citations·filing 2008–2008

51Inventor score

Technology areasG03F H10P

Files withCHEN HUI W1 DAI HUIXIONG1

Top patents by PatentIndex Score

2 records

0168US8501395B2Line edge roughness reduction and double patterningDAI HUIXIONG·Filed 2008·Granted Aug 6, 2013·5 cites·20 claims
0259US8293460B2Double exposure patterning with carbonaceous hardmaskCHEN HUI W·Filed 2008·Granted Oct 23, 2012·2 cites·8 claims

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