Inventor · disambiguated record
Irene Popova
Also filed as: POPOVA IRENE · POPOVA IRENE Y
8 granted patents·1 pending application·21 citations·filing 2006–2020
80Inventor score
Top patents by PatentIndex Score
9 records- 0189US8546062B2Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using sameHUANG WU-SONG·Filed 2011·Granted Oct 1, 2013·7 cites·16 claims
- 0286US7655379B2Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anionsIBM·Filed 2008·Granted Feb 2, 2010·9 cites·24 claims
- 0380US8097401B2Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using sameHUANG WU-SONG·Filed 2009·Granted Jan 17, 2012·4 cites·14 claims
- 0465US9726977B2Coating compositions suitable for use with an overcoated photoresistCAMERON JAMES F·Filed 2010·Granted Aug 8, 2017·1 cites·8 claims
- 0558US10982987B2Device for powder metering for chemical production processes under clean-room conditions, use thereof and metered addition methodANCOSYS GMBH·Filed 2020·Granted Apr 20, 2021·0 cites·20 claims
- 0652US10996093B2Device for powder metering for chemical production processes under clean-room conditions, use thereof and metered addition methodANCOSYS GMBH·Filed 2017·Granted May 4, 2021·0 cites·19 claims
- 0750US7608390B2Top antireflective coating composition containing hydrophobic and acidic groupsIBM·Filed 2006·Granted Oct 27, 2009·0 cites·1 claims
- 0849US8304178B2Top antireflective coating composition containing hydrophobic and acidic groupsKHOJASTEH MAHMOUD·Filed 2009·Granted Nov 6, 2012·0 cites·12 claims
- 0946US2009181319A1Aromatic fluorine-free photoacid generators and photoresist compositions containing the sameIBM·Filed 2008·Application pending·0 cites
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