Inventor · disambiguated record

Sidorkin Vadim

Also filed as: VADIM SIDORKIN

1 granted patent·3 citations·filing 2005–2005

21Inventor score

Technology areasH01J

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0168US7189981B2Electromagnetic focusing method for electron-beam lithography systemSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 13, 2007·3 cites·13 claims

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