Inventor · disambiguated record
Reinhold Schwarzenbacher
Also filed as: SCHWARZENBACHER REINHOLD
7 granted patents·2 pending applications·15 citations·filing 2011–2016
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0170US9484229B2Device and method for processing wafer-shaped articlesLACH OTTO·Filed 2011·Granted Nov 1, 2016·5 cites·9 claims
- 0269US8899246B2Device and method for processing wafer shaped articlesPLAZONIC ANTE·Filed 2011·Granted Dec 2, 2014·5 cites·14 claims
- 0366US9698029B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2014·Granted Jul 4, 2017·2 cites·13 claims
- 0465US9779979B2Apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2014·Granted Oct 3, 2017·2 cites·25 claims
- 0561US9972514B2Apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2016·Granted May 15, 2018·1 cites·13 claims
- 0642US10134611B2Collector for use with an apparatus for treating wafer-shaped articlesLAM RES AG·Filed 2013·Granted Nov 20, 2018·0 cites·17 claims
- 0737US2014053982A1Method and apparatus for processing wafer-shaped articlesHOHENWARTER KARL-HEINZ·Filed 2012·Application pending·0 cites
- 0833US10483010B2Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environmentLAM RES AG·Filed 2016·Granted Nov 19, 2019·0 cites·19 claims
- 0929US2016376702A1Dual mode chamber for processing wafer-shaped articlesLAM RES AG·Filed 2015·Application pending·0 cites
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