Inventor · disambiguated record
Kaori Kirikihira
Also filed as: KIRIKIHIRA KAORI
2 granted patents·7 citations·filing 2013–2015
52Inventor score
Technology areasH10P
Files withHITACHI INT ELECTRIC INC2
Top patents by PatentIndex Score
2 records- 0183US8987146B2Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Mar 24, 2015·6 cites·19 claims
- 0263US9899211B2Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Feb 20, 2018·1 cites·18 claims
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