Inventor · disambiguated record
Min-Cheng Wu
Also filed as: WU MIN · WU MIN-CHENG
28 granted patents·3 pending applications·18 citations·filing 2017–2024
94Inventor score
Top patents by PatentIndex Score
31 records- 0196US11409201B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 9, 2022·2 cites·20 claims
- 0292US11852980B2Techniques for correction of aberrationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·2 cites·20 claims
- 0389US11550233B2Lithography system and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 10, 2023·2 cites·20 claims
- 0489US11092892B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 17, 2021·2 cites·20 claims
- 0588US10971352B2Cleaning method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 6, 2021·3 cites·20 claims
- 0687US10867824B2Substrate detecting system in a substrate storage containerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 15, 2020·3 cites·20 claims
- 0781US12007691B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 11, 2024·0 cites·20 claims
- 0880US12443112B2Techniques for correction of aberrationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 14, 2025·0 cites·20 claims
- 0980US11923187B2Cleaning method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 1079US10678146B2Particle removal from wafer table and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 9, 2020·1 cites·20 claims
- 1179US2024312814A1Method of operating a processing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1277US11409200B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 9, 2022·0 cites·20 claims
- 1377US10613444B2Semiconductor apparatus and method of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 7, 2020·1 cites·20 claims
- 1476US12025923B2Lithography system and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 2, 2024·0 cites·20 claims
- 1576US10775700B2Lithography system and method for exposing waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 15, 2020·1 cites·20 claims
- 1675US11302566B2Wafer table with dynamic support pinsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 12, 2022·0 cites·20 claims
- 1773US11899378B2Lithography system and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 13, 2024·0 cites·20 claims
- 1873US11562898B2Cleaning method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 24, 2023·0 cites·20 claims
- 1973US11217475B2Wafer table with dynamic support pinsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jan 4, 2022·0 cites·20 claims
- 2073US11081383B2Substrate table with vacuum channels gridTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Aug 3, 2021·1 cites·20 claims
- 2171US12020963B2Method of performing a substrate detection processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 25, 2024·0 cites·20 claims
- 2270US2025135603A1Method for designing grinding disc for high-wear-resistant workpiecesUNIV HUAQIAO·Filed 2024·Application pending·0 cites
- 2369US11269261B2Particle removal from wafer table and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 8, 2022·0 cites·20 claims
- 2469US10811300B2Wafer table with dynamic support pinsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 20, 2020·0 cites·20 claims
- 2568US11923231B2Substrate table with vacuum channels gridTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 5, 2024·0 cites·20 claims
- 2668US10651075B2Wafer table with dynamic support pinsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 12, 2020·0 cites·20 claims
- 2765US10522385B2Wafer table with dynamic support pinsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 31, 2019·0 cites·20 claims
- 2860US11016390B2Method for exposing waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 25, 2021·0 cites·20 claims
- 2959US10775706B2Lithography apparatus and method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 15, 2020·0 cites·20 claims
- 3047US2024387183A1Chemical-mechanical combined machining method for silicon carbide surfaceUNIV HUAQIAO·Filed 2022·Application pending·0 cites
- 3132US10817015B2Display device and method for operating display deviceAMTRAN TECHNOLOGY CO LTD·Filed 2019·Granted Oct 27, 2020·0 cites·7 claims
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