Inventor · disambiguated record

Susanne Töpfer

Also filed as: TÖPFER SUSANNE

1 granted patent·0 citations·filing 2021–2021

3Inventor score

Technology areasG06N

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0151US12307334B2Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography processZEISS CARL SMT GMBH·Filed 2021·Granted May 20, 2025·0 cites·25 claims

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