Inventor · disambiguated record

Ezequiel Vidal-Russell

Also filed as: VIDAL-RUSSELL EZEQUIEL

1 granted patent·1 pending application·0 citations·filing 2007–2008

7Inventor score

Technology areasG03B G03F

Files withLEE CHUNG-YI1 MICRON TECHNOLOGY INC1

Top patents by PatentIndex Score

2 records

0142US8184264B2Calibration methods and devices useful in semiconductor photolithographyLEE CHUNG-YI·Filed 2008·Granted May 22, 2012·0 cites·19 claims
0238US2008297753A1Apparatus and method for defect-free microlithographyMICRON TECHNOLOGY INC·Filed 2007·Application pending·0 cites

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