Inventor · disambiguated record
Manfred Schrenk
Also filed as: SCHRENK MANFRED · SCHRENK MANFRED HELMUT GUSTAV WILHELM JOHANNES
4 granted patents·28 citations·filing 2000–2007
74Inventor score
Top patents by PatentIndex Score
4 records- 0189US7282701B2Sensor for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Oct 16, 2007·12 cites·3 claims
- 0286US7453078B2Sensor for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 18, 2008·8 cites·3 claims
- 0361US6324897B1Partial-pressure sensorJENOPTIK JENA GMBH·Filed 2000·Granted Dec 4, 2001·8 cites·11 claims
- 0452US8629418B2Lithographic apparatus and sensor thereforVAN DE KERKHOF MARCUS ADRIANUS·Filed 2006·Granted Jan 14, 2014·0 cites·23 claims
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