Inventor · disambiguated record

Yoshihiro Terakubo

Also filed as: TERAKUBO YOSHIHIRO

1 granted patent·8 citations·filing 2018–2018

31Inventor score

Technology areasH10P

Files withOKAMOTO MACHINE TOOL WORKS1

Top patents by PatentIndex Score

1 record

0188US10964576B2Electrostatic attachment chuck, method for manufacturing the same, and semiconductor device manufacturing methodOKAMOTO MACHINE TOOL WORKS·Filed 2018·Granted Mar 30, 2021·8 cites·8 claims

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