Inventor · disambiguated record
Sven-Manfred Spiller
Also filed as: SPILLER SVEN · SPILLER SVEN-MANFRED
2 granted patents·1 pending application·10 citations·filing 2009–2015
50Inventor score
Top patents by PatentIndex Score
3 records- 0185US9929018B2Semiconductor wafer and method for producing sameDISCO CORP·Filed 2015·Granted Mar 27, 2018·10 cites·7 claims
- 0247US2011260296A1Semiconductor wafer and method for producing sameBIECK FLORIAN·Filed 2009·Application pending·0 cites
- 0345US9063407B2Photolithography mask method for a wafer, method for producing same, and photolithography method for wafer using the sameBIECK FLORIAN·Filed 2011·Granted Jun 23, 2015·0 cites·15 claims
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