Inventor · disambiguated record
Fan Zhi
Also filed as: ZHI FAN
3 granted patents·0 citations·filing 2015–2016
38Inventor score
Technology areasG03F
Files withUNIV TSINGHUA3
Top patents by PatentIndex Score
3 records- 0143US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 0234US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
- 0333US9995569B2Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stageUNIV TSINGHUA·Filed 2016·Granted Jun 12, 2018·0 cites·1 claims
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