Inventor · disambiguated record
Hirosi Nisihata
Also filed as: NISIHATA HIROSI
2 granted patents·2 citations·filing 2014–2017
38Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0169US9704730B2Substrate cleaning apparatus, substrate cleaning method and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Jul 11, 2017·2 cites·6 claims
- 0247US9805958B2Substrate cleaning apparatus, substrate cleaning method and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Oct 31, 2017·0 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →