Inventor · disambiguated record
Masato Toyota
Also filed as: TOYOTA MASATO
2 granted patents·2 pending applications·22 citations·filing 1996–2005
59Inventor score
Top patents by PatentIndex Score
4 records- 0172US6768542B2Defect inspecting device for substrate to be processed and method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Jul 27, 2004·18 cites·11 claims
- 0237US2005024630A1Device for examining end partRENESAS TECH CORP·Filed 2004·Application pending·0 cites
- 0333US5679204APlasma apparatusSHIKOKU INSTRUMENTATION CO LTD·Filed 1996·Granted Oct 21, 1997·4 cites·9 claims
- 0429US2005257746A1Clamp member, film deposition apparatus, film deposition method, and semiconductor device manufacturing methodSHIRAKAWA KENJI·Filed 2005·Application pending·0 cites
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