Inventor · disambiguated record
Miia Mäntymäki
Also filed as: MAENTYMAEKI MIIA · MÄNTYMÄKI MIIA
3 granted patents·7 citations·filing 2013–2016
59Inventor score
Technology areasC23C
Files withASM IP HOLDING BV3
Top patents by PatentIndex Score
3 records- 0191US9382615B2Vapor deposition of LiF thin filmsASM IP HOLDING BV·Filed 2013·Granted Jul 5, 2016·6 cites·16 claims
- 0275US9394609B2Atomic layer deposition of aluminum fluoride thin filmsASM IP HOLDING BV·Filed 2015·Granted Jul 19, 2016·1 cites·20 claims
- 0365US9909211B2Vapor deposition of LiF thin filmsASM IP HOLDING BV·Filed 2016·Granted Mar 6, 2018·0 cites·19 claims
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