Inventor · disambiguated record
Tsutomu Fukunaga
Also filed as: FUKUNAGA TSUTOMU
3 granted patents·8 citations·filing 2011–2022
57Inventor score
Top patents by PatentIndex Score
3 records- 0181US8378272B2Heat treatment apparatus, heat treatment method and storage mediumTOKYO ELECTRON LTD·Filed 2011·Granted Feb 19, 2013·7 cites·5 claims
- 0248US12491602B2Substrate processing apparatus, polishing pad inspecting device, and method for inspecting polishing padTOKYO ELECTRON LTD·Filed 2022·Granted Dec 9, 2025·0 cites·15 claims
- 0345US8733537B2Guiding apparatus that maintains attitude of suspended object during conveyanceNHK SPRING CO LTD·Filed 2013·Granted May 27, 2014·1 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →