Inventor · disambiguated record
Matthew R. Graham
Also filed as: GRAHAM MATTHEW · GRAHAM MATTHEW R · GRAHAM MATTHEW RYAN
31 granted patents·2 pending applications·155 citations·filing 2006–2023
96Inventor score
Top patents by PatentIndex Score
33 records- 0191US8598552B1System and method to optimize extreme ultraviolet light generationFRIHAUF PAUL·Filed 2012·Granted Dec 3, 2013·25 cites·20 claims
- 0288US9832853B2Alignment of light source focusASML NETHERLANDS BV·Filed 2014·Granted Nov 28, 2017·7 cites·25 claims
- 0387US8648999B2Alignment of light source focusGRAHAM MATTHEW R·Filed 2010·Granted Feb 11, 2014·9 cites·29 claims
- 0485US9301382B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceCymer LLC·Filed 2013·Granted Mar 29, 2016·6 cites·20 claims
- 0584US9795023B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2016·Granted Oct 17, 2017·3 cites·15 claims
- 0683US9755396B1EUV LPP source with improved dose control by combining pulse modulation and pulse control modeASML NETHERLANDS BV·Filed 2016·Granted Sep 5, 2017·4 cites·19 claims
- 0782US7959554B2Medical graft products with differing regions and methods and systems for producing the sameCOOK BIOTECH INC·Filed 2006·Granted Jun 14, 2011·27 cites·17 claims
- 0881US9226736B2Volumetric grafts for treatment of fistulae and related methods and systemsOBERMILLER F JOSEPH·Filed 2010·Granted Jan 5, 2016·10 cites·12 claims
- 0981US8872122B2Method of timing laser beam pulses to regulate extreme ultraviolet light dosingCYMER INC·Filed 2013·Granted Oct 28, 2014·6 cites·20 claims
- 1079US9572556B2Volumetric grafts for treatment of fistulae and related methods and systemsOBERMILLER F JOSEPH·Filed 2006·Granted Feb 21, 2017·13 cites·45 claims
- 1179US9456813B2Volumetric grafts for treatment of fistulae and related methods and systemsOBERMILLER F JOSEPH·Filed 2012·Granted Oct 4, 2016·7 cites·23 claims
- 1278US9000403B2System and method for adjusting seed laser pulse width to control EUV output energyCYMER INC·Filed 2013·Granted Apr 7, 2015·3 cites·18 claims
- 1378US8295316B2Method and system for managing light source operationAKINS ROBERT P·Filed 2010·Granted Oct 23, 2012·5 cites·11 claims
- 1475US11064987B2Volumetric grafts for treatment of fistulae and related methods and systemsCOOK BIOTECH INC·Filed 2017·Granted Jul 20, 2021·1 cites·20 claims
- 1575US10615583B2In-ground enclosure systemBOBSBOX LLC·Filed 2019·Granted Apr 7, 2020·3 cites·21 claims
- 1675US10237960B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·1 cites·19 claims
- 1774US10681795B2Apparatus for and method of source material delivery in a laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2019·Granted Jun 9, 2020·1 cites·20 claims
- 1872US10234769B2Monitoring system for an optical lithography systemCymer LLC·Filed 2017·Granted Mar 19, 2019·1 cites·30 claims
- 1971US9687215B2Volumetric grafts for treatment of fistulae and related methods and systemsOBERMILLER F JOSEPH·Filed 2009·Granted Jun 27, 2017·5 cites·19 claims
- 2069US9588430B2System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light productionASML NETHERLANDS BV·Filed 2016·Granted Mar 7, 2017·1 cites·16 claims
- 2169US8872123B2Method of timing laser beam pulses to regulate extreme ultraviolet light dosingCYMER INC·Filed 2013·Granted Oct 28, 2014·3 cites·14 claims
- 2264US9956315B2Fistula graft with deformable sheet-form materialPATEL UMESH H·Filed 2006·Granted May 1, 2018·4 cites·27 claims
- 2364US8993976B2Energy sensors for light beam alignmentGRAHAM MATTHEW·Filed 2011·Granted Mar 31, 2015·4 cites·30 claims
- 2457US12085862B2Laser system for source material conditioning in an EUV light sourceASML NETHERLANDS BV·Filed 2020·Granted Sep 10, 2024·0 cites·20 claims
- 2555US9363877B2System and method to reduce oscillations in extreme ultraviolet light generationASML NETHERLANDS BV·Filed 2014·Granted Jun 7, 2016·1 cites·20 claims
- 2655US8368041B2System and method for compensating for thermal effects in an EUV light sourceCYMER INC·Filed 2011·Granted Feb 5, 2013·1 cites·13 claims
- 2752US10903635B2In-ground enclosure systemBOBSBOX LLC·Filed 2020·Granted Jan 26, 2021·0 cites·19 claims
- 2852US9238243B2System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light productionVAN DER BURGT JEROEN·Filed 2012·Granted Jan 19, 2016·1 cites·18 claims
- 2947US2025071933A1Electronics Cabinet with Improved Air FlowCLIMATE CONDITIONING COMPANY INC·Filed 2023·Application pending·0 cites
- 3046US2009082816A1Remodelable orthopaedic spacer and method of using the sameGRAHAM MATTHEW R·Filed 2007·Application pending·0 cites
- 3141US9127981B2System and method for return beam metrology with optical switchCymer LLC·Filed 2013·Granted Sep 8, 2015·0 cites·18 claims
- 3237USD800222SPortable signGRAHAM MATTHEW R·Filed 2015·Granted Oct 17, 2017·2 cites·1 claims
- 3333USD800221SPortable signGRAHAM MATTHEW R·Filed 2015·Granted Oct 17, 2017·1 cites·1 claims
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