Inventor · disambiguated record
Alexei V. Smirnov
Also filed as: SMIRNOV ALEXEI · SMIRNOV ALEXEI V
38 granted patents·3 pending applications·270 citations·filing 2006–2021
97Inventor score
Top patents by PatentIndex Score
41 records- 0196US11435764B1Mass flow controller utilizing nonlinearity component functionsHITACHI METALS LTD·Filed 2021·Granted Sep 6, 2022·4 cites·18 claims
- 0295US9027585B2Adaptive pressure insensitive mass flow controller and method for multi-gas applicationsSMIRNOV ALEXEI V·Filed 2011·Granted May 12, 2015·28 cites·11 claims
- 0392US8915262B2Mass flow controller algorithm with adaptive valve start positionSMIRNOV ALEXEI V·Filed 2011·Granted Dec 23, 2014·17 cites·10 claims
- 0492US8499786B2Mass flow controller with enhanced operating rangeZOLOCK MICHAEL J·Filed 2010·Granted Aug 6, 2013·17 cites·14 claims
- 0592US7649328B2Compact high-power pulsed terahertz sourceDULY RES INC·Filed 2007·Granted Jan 19, 2010·19 cites·7 claims
- 0689US7640078B2Multi-mode control algorithmADVANCED ENERGY IND INC·Filed 2006·Granted Dec 29, 2009·22 cites·25 claims
- 0788US7603186B2Adaptive response time closed loop control algorithmADVANCED ENERGY IND INC·Filed 2006·Granted Oct 13, 2009·18 cites·25 claims
- 0887US9146563B2Mass flow controller and method for improved performance across fluid typesHITACHI METALS LTD·Filed 2013·Granted Sep 29, 2015·8 cites·7 claims
- 0987US7835499B2Compact, short-pulse X-ray and T-ray fused sourceYU DAVID U L·Filed 2009·Granted Nov 16, 2010·11 cites·5 claims
- 1084US10126761B2Gas insensitive mass flow control systems and methodsHITACHI METALS LTD·Filed 2016·Granted Nov 13, 2018·6 cites·8 claims
- 1184US9256228B2Mass flow controller with onboard diagnostics, prognostics, and data loggingSMIRNOV ALEXEI V·Filed 2012·Granted Feb 9, 2016·9 cites·12 claims
- 1283US11253360B2Low profile tissue anchor for minimally invasive heart valve repairNEOCHORD INC·Filed 2019·Granted Feb 22, 2022·6 cites·16 claims
- 1383US11209298B2Thermal mass flow sensor with improved accuracyHITACHI METALS LTD·Filed 2019·Granted Dec 28, 2021·2 cites·18 claims
- 1483US10533982B2Mass flow controller and method for controlling a mass flow rate of a gas in a gas streamHITACHI METALS LTD·Filed 2019·Granted Jan 14, 2020·2 cites·9 claims
- 1583US10295518B2System and method for detecting concentration of a gas in a gas streamHITACHI METALS LTD·Filed 2016·Granted May 21, 2019·2 cites·10 claims
- 1683US9560699B2Microwave processing chamberZHYLKOV VALERIE S·Filed 2010·Granted Jan 31, 2017·17 cites·23 claims
- 1783US8504311B2Method and mass flow controller for enhanced operating rangeSMIRNOV ALEXEI V·Filed 2010·Granted Aug 6, 2013·7 cites·7 claims
- 1883US8131400B2Adaptive on-tool mass flow controller tuningSMIRNOV ALEXEI V·Filed 2010·Granted Mar 6, 2012·11 cites·18 claims
- 1981US11327510B2Multi-chamber rate-of-change system for gas flow verificationHITACHI METALS LTD·Filed 2019·Granted May 10, 2022·1 cites·12 claims
- 2080US7971604B2Flow controller delivery of a specified-quantity of a fluidHITACHI METALS LTD·Filed 2006·Granted Jul 5, 2011·19 cites·10 claims
- 2176US7971480B2Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elementsHITACHI METALS LTD·Filed 2008·Granted Jul 5, 2011·10 cites·11 claims
- 2274US10473500B2System and method for improved indicated flow in mass flow controllersHITACHI METALS LTD·Filed 2014·Granted Nov 12, 2019·3 cites·19 claims
- 2373US9488516B2On-tool mass flow controller diagnostic systems and methodsHITACHI METALS LTD·Filed 2014·Granted Nov 8, 2016·3 cites·8 claims
- 2472US9605992B2On-tool mass flow controller diagnostic systems and methodsHITACHI METALS LTD·Filed 2014·Granted Mar 28, 2017·2 cites·16 claims
- 2572US8321060B2Method and system of on-tool and on-site MFC optimization providing consistent responseSMIRNOV ALEXEI V·Filed 2010·Granted Nov 27, 2012·9 cites·21 claims
- 2671US11041749B1Multi-gas mass flow controller and methodHITACHI METALS LTD·Filed 2019·Granted Jun 22, 2021·1 cites·8 claims
- 2771US8196601B2Thermal flow sensor with zero drift compensationSMIRNOV ALEXEI V·Filed 2009·Granted Jun 12, 2012·7 cites·20 claims
- 2865US8251091B2Temperature insensitive mass flow controllerZOLOCK MICHAEL J·Filed 2009·Granted Aug 28, 2012·5 cites·14 claims
- 2963US11073845B2Parasitic flow correction method and apparatusHITACHI METALS LTD·Filed 2019·Granted Jul 27, 2021·0 cites·12 claims
- 3062US10041825B2On-tool mass flow controller diagnostic systems and methodsHITACHI METALS LTD·Filed 2017·Granted Aug 7, 2018·0 cites·7 claims
- 3160US10982985B2High flow tubular bypassHITACHI METALS LTD·Filed 2020·Granted Apr 20, 2021·0 cites·10 claims
- 3260US9846073B2On-tool mass flow controller diagnostic systems and methodsHITACHI METALS LTD·Filed 2017·Granted Dec 19, 2017·0 cites·18 claims
- 3353US10534375B2Gas insensitive mass flow control systems and methodsHITACHI METALS LTD·Filed 2018·Granted Jan 14, 2020·0 cites·12 claims
- 3452US8160833B2Thermal mass flow sensor with improved response across fluid typesSMIRNOV ALEXEI V·Filed 2009·Granted Apr 17, 2012·2 cites·21 claims
- 3550US8195312B2Multi-mode control loop with improved performance for mass flow controllerSMIRNOV ALEXEI V·Filed 2009·Granted Jun 5, 2012·2 cites·17 claims
- 3646US9898013B2Mass flow controller for improved performance across fluid typesHITACHI METALS LTD·Filed 2015·Granted Feb 20, 2018·0 cites·15 claims
- 3746US2017118807A1Microwave processing chamberUPSCALE HOLDINGS INC·Filed 2016·Application pending·0 cites
- 3845US8671973B2Mass flow controller hysteresis compensation system and methodSMIRNOV ALEXEI V·Filed 2009·Granted Mar 18, 2014·0 cites·4 claims
- 3943US9766635B2Mass flow controller with onboard diagnostics, prognostics, and data loggingHITACHI METALS LTD·Filed 2016·Granted Sep 19, 2017·0 cites·9 claims
- 4037US2008068110A1Symmetrized coupler converting circular waveguide TM01 mode to rectangular waveguide TE10 modeDULY RES INC·Filed 2006·Application pending·0 cites
- 4136US2008068112A1Rod-loaded radiofrequency cavities and couplersYU DAVID U L·Filed 2006·Application pending·0 cites
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