Inventor · disambiguated record
Fred Sun
Also filed as: SUN FRED · SUN FRED F
6 granted patents·4 pending applications·78 citations·filing 2002–2016
80Inventor score
Top patents by PatentIndex Score
10 records- 0186US7044836B2Coated metal oxide particles for CMPCABOT MICROELECTRONICS CORP·Filed 2003·Granted May 16, 2006·51 cites·44 claims
- 0276US6811474B2Polishing composition containing conducting polymerCABOT MICROELECTRONICS CORP·Filed 2002·Granted Nov 2, 2004·20 cites·21 claims
- 0361US7255810B2Polishing system comprising a highly branched polymerCABOT MICROELECTRONICS CORP·Filed 2004·Granted Aug 14, 2007·2 cites·23 claims
- 0456US7021993B2Method of polishing a substrate with a polishing system containing conducting polymerCABOT MICROELECTRONICS CORP·Filed 2002·Granted Apr 4, 2006·5 cites·27 claims
- 0539US2006278614A1Polishing composition and method for defect improvement by reduced particle stiction on copper surfaceCABOT MICROELECTRONICS CORP·Filed 2005·Application pending·0 cites
- 0637US9828574B2Cleaning composition and method for cleaning semiconductor wafers after CMPCABOT MICROELECTRONICS CORP·Filed 2016·Granted Nov 28, 2017·0 cites·19 claims
- 0735US10100272B2Cleaning composition following CMP and methods related theretoCABOT MICROELECTRONICS CORP·Filed 2015·Granted Oct 16, 2018·0 cites·28 claims
- 0835US2007190789A1Compositions and methods for CMP of indium tin oxide surfacesCARTER PHILLIP·Filed 2007·Application pending·0 cites
- 0932US2011014858A1Grooved cmp polishing padCABOT MICROELECTRONICS CORP·Filed 2010·Application pending·0 cites
- 1030US2017158993A1Stabilization of tris(2 hydroxyethyl)methylammonium hydroxide against decomposition with dialkyhydroxylamineCABOT MICROELECTRONICS CORP·Filed 2015·Application pending·0 cites
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