Inventor · disambiguated record
Yung-Dar Chen
Also filed as: CHEN YUNG-DAR
12 granted patents·1 pending application·218 citations·filing 1996–2005
91Inventor score
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13 records- 0186US6159662APhotoresist development method with reduced cycle time and improved performanceTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Dec 12, 2000·63 cites·8 claims
- 0276US6042976AMethod of calibrating WEE exposure toolTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 28, 2000·51 cites·12 claims
- 0368US5868278AEliminating microbubbles in developer solutions to reduce photoresist residuesTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Feb 9, 1999·27 cites·15 claims
- 0468US5789117ATransfer method for non-critical photoresist patternsTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Aug 4, 1998·28 cites·12 claims
- 0555US7285147B2Air supply systems and pressure adjustment devices for use therewithTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 23, 2007·9 cites·16 claims
- 0652US7025809B2Dual-type air purification systemTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Apr 11, 2006·5 cites·33 claims
- 0745US6863716B2Trap-type air purification systemTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 8, 2005·4 cites·14 claims
- 0845US6085430AApparatus and method for measuring eccentricity between two circular membersTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jul 11, 2000·16 cites·18 claims
- 0943US6702197B2Anti-electrostatic discharge spray gun apparatus and methodTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 9, 2004·3 cites·20 claims
- 1038US7316240B2Exhaust system and mini-exhaust static pressure controlling apparatus thereofTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jan 8, 2008·0 cites·9 claims
- 1138US2005274414A1Drain device for high negative pressure exhaust systemKUO PO-SUNG·Filed 2004·Application pending·0 cites
- 1231US6273935B1Apparatus and method for trapping a toxic gasTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Aug 14, 2001·5 cites·18 claims
- 1331US6170165B1Method and apparatus for measuring a gapTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jan 9, 2001·7 cites·4 claims
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