Inventor · disambiguated record
Shumay X. Dou
Also filed as: DOU SHUMAY · DOU SHUMAY X
11 granted patents·568 citations·filing 1997–2003
92Inventor score
Top patents by PatentIndex Score
11 records- 0197US6425117B1System and method for performing optical proximity correction on the interface between optical proximity corrected cellsLSI LOGIC CORP·Filed 1997·Granted Jul 23, 2002·393 cites·18 claims
- 0284US5926720AConsistent alignment mark profiles on semiconductor wafers using PVD shadowingLSI LOGIC CORP·Filed 1997·Granted Jul 20, 1999·64 cites·16 claims
- 0374US6713386B1Method of preventing resist poisoning in dual damascene structuresLSI LOGIC CORP·Filed 2001·Granted Mar 30, 2004·17 cites·4 claims
- 0462US6157087AConsistent alignment mark profiles on semiconductor wafers using metal organic chemical vapor deposition titanium nitride protective layerLSI LOGIC CORP·Filed 1999·Granted Dec 5, 2000·22 cites·5 claims
- 0557US6239499B1Consistent alignment mark profiles on semiconductor wafers using PVD shadowingLSI LOGIC CORP·Filed 1998·Granted May 29, 2001·18 cites·15 claims
- 0651US6969683B2Method of preventing resist poisoning in dual damascene structuresLSI LOGIC CORP·Filed 2003·Granted Nov 29, 2005·3 cites·16 claims
- 0750US5863825AAlignment mark contrast enhancementLSI LOGIC CORP·Filed 1997·Granted Jan 26, 1999·19 cites·19 claims
- 0849US6060787AConsistent alignment mark profiles on semiconductor wafers using fine grain tungsten protective layerLSI LOGIC CORP·Filed 1999·Granted May 9, 2000·12 cites·14 claims
- 0947US5981352AConsistent alignment mark profiles on semiconductor wafers using fine grain tungsten protective layerLSI LOGIC CORP·Filed 1997·Granted Nov 9, 1999·11 cites·11 claims
- 1046US6458508B1Method of protecting acid-catalyzed photoresist from chip-generated basic contaminantsLSI LOGIC CORP·Filed 2001·Granted Oct 1, 2002·1 cites·23 claims
- 1142US5966613AConsistent alignment mark profiles on semiconductor wafers using metal organic chemical vapor deposition titanium nitride protectiveLSI CORP·Filed 1997·Granted Oct 12, 1999·8 cites·12 claims
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