Inventor · disambiguated record

Ben-Shu Chen

Also filed as: CHEN BEN-SHU

1 granted patent·9 citations·filing 2002–2002

31Inventor score

Technology areasF04B

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0161US6860723B2Slurry flow control and monitor system for chemical mechanical polisherTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 1, 2005·9 cites·10 claims

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