Inventor · disambiguated record
Gladys So-Wan Lo
Also filed as: LO GLADYS · LO GLADYS SO-WAN
4 granted patents·22 citations·filing 1999–2011
70Inventor score
Top patents by PatentIndex Score
4 records- 0172US6777173B2H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist stripLAM RES CORP·Filed 2002·Granted Aug 17, 2004·18 cites·25 claims
- 0259US8431461B1Silicon nitride dry trim without top pulldownZHONG QINGHUA·Filed 2011·Granted Apr 30, 2013·1 cites·19 claims
- 0338US6554952B1Method and apparatus for etching a gold metal layer using a titanium hardmaskLAM RES CORP·Filed 2001·Granted Apr 29, 2003·2 cites·7 claims
- 0425US6306312B1Method for etching a gold metal layer using a titanium hardmaskLAM RES CORP·Filed 1999·Granted Oct 23, 2001·1 cites·12 claims
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