Inventor · disambiguated record

Akihiro Shigeno

Also filed as: SHIGENO AKIHIRO

1 granted patent·212 citations·filing 1998–1998

56Inventor score

Technology areasH10W

Files withFUJITSU LTD1

Top patents by PatentIndex Score

1 record

0193US6159770AMethod and apparatus for fabricating semiconductor deviceFUJITSU LTD·Filed 1998·Granted Dec 12, 2000·212 cites·9 claims

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