Inventor · disambiguated record
Zou Zheng
Also filed as: ZHENG ZOU
2 granted patents·38 citations·filing 1999–2001
61Inventor score
Files withCHARTERED SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0170US6124927AMethod to protect chamber wall from etching by endpoint plasma cleanCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Sep 26, 2000·31 cites·12 claims
- 0256US6660642B2Toxic residual gas removal by non-reactive ion sputteringCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Dec 9, 2003·7 cites·24 claims
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