Inventor · disambiguated record

Joseph P. Simon

Also filed as: SIMON JOSEPH P

3 granted patents·43 citations·filing 2002–2003

71Inventor score

Technology areasB24B

Files withLAM RES CORP3

Top patents by PatentIndex Score

3 records

0181US6896586B2Method and apparatus for heating polishing padLAM RES CORP·Filed 2002·Granted May 24, 2005·26 cites·16 claims
0268US6609952B1Chemical mechanical planarization (CMP) system and method for determining an endpoint in a CMP operationLAM RES CORP·Filed 2002·Granted Aug 26, 2003·13 cites·14 claims
0348US6749483B2Chemical mechanical planarization (CMP) system and method for determining an endpoint in a CMP operationLAM RES CORP·Filed 2003·Granted Jun 15, 2004·4 cites·12 claims

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