Inventor · disambiguated record
Shigemitsu Maruno
Also filed as: MARUNO SHIGEMITSU
4 granted patents·60 citations·filing 1999–2000
76Inventor score
Top patents by PatentIndex Score
4 records- 0173US6635938B1Semiconductor device and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Oct 21, 2003·19 cites·22 claims
- 0273US6228728B1Method of fabricating semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 1999·Granted May 8, 2001·35 cites·20 claims
- 0344US6232192B1Method of manufacturing semiconductor device having sidewall portions removedMITUBISHI DENKI KABUSHIKI KAIS·Filed 2000·Granted May 15, 2001·1 cites·12 claims
- 0436US6373108B1Semiconductor device having reduced sheet resistance of source/drain regionsMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Apr 16, 2002·5 cites·7 claims
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