Inventor · disambiguated record

Fritjof Hempel

Also filed as: HEMPEL FRITJOF

1 granted patent·23 citations·filing 2007–2007

41Inventor score

Technology areasG03F

Files withADVANCED MICRO DEVICES INC1

Top patents by PatentIndex Score

1 record

0191US7842442B2Method and system for reducing overlay errors within exposure fields by APC control strategiesADVANCED MICRO DEVICES INC·Filed 2007·Granted Nov 30, 2010·23 cites·19 claims

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