Inventor · disambiguated record
Kah K. Low
Also filed as: LOW KAH K
3 granted patents·120 citations·filing 1994–1994
76Inventor score
Technology areasG03F
Files withSEMATECH INC3
Top patents by PatentIndex Score
3 records- 0181US5418095AMethod of fabricating phase shifters with absorbing/attenuating sidewalls using an additive processSEMATECH INC·Filed 1994·Granted May 23, 1995·43 cites·16 claims
- 0279US5472811APhase shifting mask structure with multilayer optical coating for improved transmissionSEMATECH INC·Filed 1994·Granted Dec 5, 1995·39 cites·14 claims
- 0379US5411824APhase shifting mask structure with absorbing/attenuating sidewalls for improved imagingSEMATECH INC·Filed 1994·Granted May 2, 1995·38 cites·16 claims
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