Inventor · disambiguated record
Tadayasu Ohsawa
Also filed as: OHSAWA TADAYASU
3 granted patents·26 citations·filing 1997–2001
68Inventor score
Technology areasH10P
Files withKAIJO KK3
Top patents by PatentIndex Score
3 records- 0145US5853284ANotched wafer aligning apparatusKAIJO KK·Filed 1997·Granted Dec 29, 1998·19 cites·33 claims
- 0242US6325865B2Method for drying substrateKAIJO KK·Filed 2001·Granted Dec 4, 2001·2 cites·8 claims
- 0329US6244281B1Method and apparatus for drying substrateKAIJO KK·Filed 1998·Granted Jun 12, 2001·5 cites·14 claims
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