Inventor · disambiguated record
Tor G. Larsen
Also filed as: LARSEN TOR G · LARSEN TOR GROTNES
10 granted patents·275 citations·filing 1972–1982
91Inventor score
Top patents by PatentIndex Score
10 records- 0190US3955072AApparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent maskKASPER INSTRUMENTS·Filed 1972·Granted May 4, 1976·45 cites·40 claims
- 0289US4070117AApparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and maskKASPER INSTRUMENTS·Filed 1976·Granted Jan 24, 1978·46 cites·20 claims
- 0388US4615621AAuto-focus alignment and measurement system and methodEATON CORP·Filed 1982·Granted Oct 7, 1986·49 cites·29 claims
- 0484US4277177AApparatus to measure select properties of a moving sheetMEASUREX CORP·Filed 1979·Granted Jul 7, 1981·37 cites·6 claims
- 0583US4292838ACaliper gauge for the measurement of sheet members over a wide range of thicknessesMEASUREX CORP·Filed 1979·Granted Oct 6, 1981·32 cites·6 claims
- 0674US4107847AContacting caliper gaugeMEASUREX CORP·Filed 1977·Granted Aug 22, 1978·20 cites·5 claims
- 0760US4134211AContacting caliper gaugeMEASUREX CORP·Filed 1977·Granted Jan 16, 1979·12 cites·9 claims
- 0854US4580900AAuto focus alignment and measurement system and methodEATON CORP·Filed 1982·Granted Apr 8, 1986·12 cites·28 claims
- 0953US4408885AApparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and maskKASPER INSTRUMENTS·Filed 1981·Granted Oct 11, 1983·12 cites·2 claims
- 1051US4259019AApparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent maskKASPER INSTRUMENTS·Filed 1977·Granted Mar 31, 1981·10 cites·9 claims
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