Inventor · disambiguated record
Ralph Jan-Pin Lu
Also filed as: LU RALPH · LU RALPH JAN-PIN
6 granted patents·21 citations·filing 2007–2018
77Inventor score
Top patents by PatentIndex Score
6 records- 0192US10049948B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2012·Granted Aug 14, 2018·14 cites·19 claims
- 0275US7768766B2Plasma processing system ESC high voltage controlLAM RES CORP·Filed 2007·Granted Aug 3, 2010·4 cites·29 claims
- 0373US10770363B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2018·Granted Sep 8, 2020·1 cites·20 claims
- 0472US7983018B2Plasma processing system ESC high voltage control and methods thereofLAM RES CORP·Filed 2010·Granted Jul 19, 2011·2 cites·20 claims
- 0545US8315029B2ESC high voltage control and methods thereofJAFARIAN-TEHRANI SEYED JAFAR·Filed 2011·Granted Nov 20, 2012·0 cites·20 claims
- 0637US8742666B2Radio frequency (RF) power filters and plasma processing systems including RF power filtersLONG MAOLIN·Filed 2010·Granted Jun 3, 2014·0 cites·14 claims
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