Inventor · disambiguated record

Ritsuo Horii

Also filed as: HORII RITSUO

1 granted patent·0 citations·filing 2011–2011

3Inventor score

Technology areasH10P

Files withYASUI TAKESHI1

Top patents by PatentIndex Score

1 record

0130US9028191B2Substrate processing apparatus and method of manufacturing semiconductor deviceYASUI TAKESHI·Filed 2011·Granted May 12, 2015·0 cites·17 claims

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