Inventor · disambiguated record
Shou-Wen Kuo
Also filed as: KUO SHOU-WEN
46 granted patents·5 pending applications·50 citations·filing 2013–2025
96Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD51
Top patents by PatentIndex Score
51 records- 0195US10170287B1Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 1, 2019·15 cites·20 claims
- 0293US11961770B2Automated inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 16, 2024·3 cites·20 claims
- 0391US11414757B2Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 16, 2022·7 cites·16 claims
- 0490US10490463B2Automated inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 26, 2019·7 cites·20 claims
- 0585US11430108B2Defect offset correctionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 30, 2022·1 cites·20 claims
- 0684US12378668B2Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 5, 2025·0 cites·20 claims
- 0784US12334373B2Apparatus and method for inspecting wafer carriersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jun 17, 2025·0 cites·20 claims
- 0884US2025305139A1Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0983US10714364B2Apparatus and method for inspecting wafer carriersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 14, 2020·2 cites·20 claims
- 1082US10852704B2Semiconductor equipment management method, electronic device, and non-transitory computer readable storage mediumTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 1, 2020·2 cites·20 claims
- 1181US2025062153A1System and method for ring frame cleaning and inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1280US9852936B2Load port and method for loading and unloading cassetteTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 26, 2017·3 cites·20 claims
- 1379US12165901B2System and method for ring frame cleaning and inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 1479US2024377826A1Systems and methods for raised floor automated sensor vehiclesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1579US2025112081A1Vacuum wafer chuck for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1678US12412760B2EFEM robot auto teaching methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 9, 2025·0 cites·20 claims
- 1778US11842481B2Defect offset correctionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 12, 2023·0 cites·20 claims
- 1876US12153433B2Systems and methods for raised floor automated sensor vehiclesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 26, 2024·0 cites·20 claims
- 1976US9786530B2Wafer transfer method and systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 10, 2017·3 cites·19 claims
- 2076US2025299985A1Efem robot auto teaching methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2175US12037687B2Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 16, 2024·0 cites·20 claims
- 2274US12191185B2Vacuum wafer chuck for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
- 2374US11699619B2Automated transfer and drying tool for process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 11, 2023·0 cites·20 claims
- 2473US11171065B2Automated inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 9, 2021·1 cites·20 claims
- 2573US11004720B2System and method for ring frame cleaning and inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 11, 2021·1 cites·20 claims
- 2672US9460957B2Method and structure for nitrogen-doped shallow-trench isolation dielectricTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Oct 4, 2016·3 cites·18 claims
- 2771US11929271B2Apparatus and method for inspecting wafer carriersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 12, 2024·0 cites·20 claims
- 2871US11764097B2System and method for ring frame cleaning and inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 19, 2023·0 cites·20 claims
- 2970US10872794B2Automatic in-line inspection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 22, 2020·1 cites·20 claims
- 3069US10991625B2Automated transfer and drying tool for process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 27, 2021·0 cites·20 claims
- 3169US10876976B2Apparatus and method for substrate inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·1 cites·20 claims
- 3268US11754989B2Semiconductor equipment management method, electronic device, and non-transitory computer readable storage mediumTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 12, 2023·0 cites·20 claims
- 3367US11508608B2Vacuum wafer chuck for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 22, 2022·0 cites·20 claims
- 3467US10734206B2Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 4, 2020·0 cites·20 claims
- 3566US11984331B2EFEM robot auto teaching methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 14, 2024·0 cites·20 claims
- 3664US11334080B2Systems and methods for raised floor automated sensor vehiclesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 17, 2022·0 cites·20 claims
- 3763US10665507B2Automated transfer and drying tool for process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 26, 2020·0 cites·20 claims
- 3863US10559453B2Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Feb 11, 2020·0 cites·20 claims
- 3961US10665489B2Integrated chip die carrier exchangerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 26, 2020·0 cites·20 claims
- 4060US10839507B2Defect offset correctionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 17, 2020·0 cites·20 claims
- 4159US11545382B2Integrated chip die carrier exchangerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jan 3, 2023·0 cites·20 claims
- 4259US11121093B2Methods for selectively forming identification mark on semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 14, 2021·0 cites·20 claims
- 4358US12216407B2Method and apparatus for multi-spray RRC process with dynamic controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 4, 2025·0 cites·20 claims
- 4455US10861723B2EFEM robot auto teaching methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 8, 2020·0 cites·20 claims
- 4554US11651981B2Method and system for map-free inspection of semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 16, 2023·0 cites·20 claims
- 4652US10643951B2Mini identification mark in die-less region of semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 5, 2020·0 cites·20 claims
- 4750US11120539B2Topological scanning method and systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 14, 2021·0 cites·20 claims
- 4848US11152238B2Semiconductor processing stage profiler jigTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 19, 2021·0 cites·20 claims
- 4948US10971386B1Device positioning using sensorsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 6, 2021·0 cites·20 claims
- 5047US10283388B1Detaping machine and detaping methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 7, 2019·0 cites·20 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →