Inventor · disambiguated record

Atsushi Hayamizu

Also filed as: HAYAMIZU ATSUSHI

1 granted patent·0 citations·filing 2010–2010

7Inventor score

Technology areasB82Y

Files withHORIUCHI TOMOYUKI1

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1 record

0124US8614428B2Charged particle beam writing method and charged particle beam writing apparatusHORIUCHI TOMOYUKI·Filed 2010·Granted Dec 24, 2013·0 cites·3 claims

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