Inventor · disambiguated record
Sunjoong Song
Also filed as: SONG SUNJOONG
1 granted patent·2 pending applications·0 citations·filing 2017–2024
8Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0152US2025079154A1Method of manufacturing integrated circuit deviceSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0246US2024030038A1Atomic layer etching (ale) apparatus and ale method based on the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0334US10242880B2Method of wet etching and method of fabricating semiconductor device using the sameKIM KWANGSU·Filed 2017·Granted Mar 26, 2019·0 cites·17 claims
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