Inventor · disambiguated record
Robert E. Tompkins
Also filed as: TOMPKINS ROBERT · TOMPKINS ROBERT E
19 granted patents·961 citations·filing 1988–2002
96Inventor score
Top patents by PatentIndex Score
19 records- 0191US5191506ACeramic electrostatic chuckIBM·Filed 1991·Granted Mar 2, 1993·144 cites·20 claims
- 0290US5463525AGuard ring electrostatic chuckIBM·Filed 1993·Granted Oct 31, 1995·101 cites·12 claims
- 0390US5155652ATemperature cycling ceramic electrostatic chuckIBM·Filed 1991·Granted Oct 13, 1992·144 cites·6 claims
- 0488US5561585AElectrostatic chuck with reference electrodeIBM·Filed 1995·Granted Oct 1, 1996·74 cites·17 claims
- 0588US5055964AElectrostatic chuck having tapered electrodesIBM·Filed 1990·Granted Oct 8, 1991·120 cites·17 claims
- 0683US6754062B2Hybrid ceramic electrostatic clampPRAXAIR TECHNOLOGY INC·Filed 2002·Granted Jun 22, 2004·28 cites·13 claims
- 0780US6499987B1Positive control non-return valve for an injection molding machineMD PLASTICS INC·Filed 2000·Granted Dec 31, 2002·19 cites·10 claims
- 0880USRE37580EGuard ring electrostatic chuckDORSEY GAGE CO INC·Filed 1999·Granted Mar 12, 2002·49 cites·22 claims
- 0973US5521790AElectrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodizationIBM·Filed 1994·Granted May 28, 1996·53 cites·4 claims
- 1071US6268994B1Electrostatic chuck and method of manufactureDORSEY GAGE INC·Filed 1999·Granted Jul 31, 2001·44 cites·6 claims
- 1169US5535507AMethod of making electrostatic chuck with oxide insulatorIBM·Filed 1993·Granted Jul 16, 1996·47 cites·8 claims
- 1269US5099571AMethod for fabricating a split-ring electrostatic chuckIBM·Filed 1991·Granted Mar 31, 1992·44 cites·12 claims
- 1364US5467249AElectrostatic chuck with reference electrodeIBM·Filed 1993·Granted Nov 14, 1995·28 cites·12 claims
- 1455US5612851AGuard ring electrostatic chuckIBM·Filed 1995·Granted Mar 18, 1997·15 cites·12 claims
- 1555US4845995AMaterial testerUS ARMY·Filed 1988·Granted Jul 11, 1989·18 cites·6 claims
- 1649US5905626AElectrostatic chuck with ceramic pole protectionDORSEY GAGE INC·Filed 1998·Granted May 18, 1999·16 cites·6 claims
- 1737US5901030AElectrostatic chuck employing thermoelectric coolingDORSEY GAGE INC·Filed 1997·Granted May 4, 1999·7 cites·2 claims
- 1833USRE37541EElectrostatic chuck with reference electrodeDORSEY GAGE CO INC·Filed 1998·Granted Feb 5, 2002·3 cites·32 claims
- 1929US5925845AShoot-through cover for an explosively formed penetrator warheadALLIANT TECHSYSTEMS INC·Filed 1997·Granted Jul 20, 1999·7 cites·19 claims
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