Inventor · disambiguated record
Claudia Ekstein
Also filed as: EKSTEIN CLAUDIA
5 granted patents·4 pending applications·36 citations·filing 2007–2021
78Inventor score
Top patents by PatentIndex Score
9 records- 0191US7816022B2Composite structure for microlithography and optical arrangementZEISS CARL SMT AG·Filed 2009·Granted Oct 19, 2010·21 cites·39 claims
- 0282US8976927B2Substrate for mirrors for EUV lithographyZEISS CARL SMT GMBH·Filed 2013·Granted Mar 10, 2015·6 cites·20 claims
- 0381US10935704B2Substrate for an EUV-lithography mirrorZEISS CARL SMT GMBH·Filed 2017·Granted Mar 2, 2021·1 cites·10 claims
- 0474US9604299B2Method and device for connecting an optical element to a frameZEISS CARL SMT GMBH·Filed 2014·Granted Mar 28, 2017·2 cites·22 claims
- 0570US8705006B2Method and device for connecting an optical element to a frameSCHOEPPACH ARMIN·Filed 2009·Granted Apr 22, 2014·6 cites·29 claims
- 0670US2021149093A1Substrate for an euv-lithography mirrorZEISS CARL SMT GMBH·Filed 2021·Application pending·0 cites
- 0747US2013301151A1Substrate for an euv-lithography mirrorZEISS CARL SMT GMBH·Filed 2013·Application pending·0 cites
- 0844US2008100815A1Arrangement of two connected bodiesZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 0942US2007285647A1Support structure for temporarily supporting a substrateZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
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