Inventor · disambiguated record

Kai Peter

Also filed as: PETER KAI

1 granted patent·6 citations·filing 2005–2005

30Inventor score

Technology areasG03F

Files withPDF SOLUTIONS1

Top patents by PatentIndex Score

1 record

0178US7568180B2Generalization of the photo process window and its application to OPC test pattern designPDF SOLUTIONS·Filed 2005·Granted Jul 28, 2009·6 cites·20 claims

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