Inventor · disambiguated record
Su-Ling Tseng
Also filed as: TSENG SU-LING
1 granted patent·4 pending applications·7 citations·filing 2001–2005
28Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0148US6651284B2Scrubbing assembly for wafer-cleaning deviceSILICON INTEGRATED SYS CORP·Filed 2001·Granted Nov 25, 2003·7 cites·7 claims
- 0234US2007054490A1Semiconductor process for preventing layer peeling in wafer edge area and method for manufacturing interconnectsCHEN YEN-HUNG·Filed 2005·Application pending·0 cites
- 0327US2004092126A1Method for preventing reworked photoresist from collapsingSILICON INTEGRATED SYS CORP·Filed 2002·Application pending·0 cites
- 0417US2003047194A1Apparatus and method for cleaning wafersFiled 2001·Application pending·0 cites
- 0517US2002178603A1Wafer drying apparatus using isopropanolFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →