Inventor · disambiguated record
Edward K. Mcintyre
Also filed as: MCINTYRE EDWARD · MCINTYRE EDWARD K · MCINTYRE JR EDWARD K
12 granted patents·1 pending application·342 citations·filing 1990–2017
91Inventor score
Top patents by PatentIndex Score
13 records- 0193US7838850B2External cathode ion sourceSEMEQUIP INC·Filed 2008·Granted Nov 23, 2010·24 cites·14 claims
- 0291US5497006AIon generating source for use in an ion implanterEATON CORP·Filed 1994·Granted Mar 5, 1996·167 cites·19 claims
- 0384US6608315B1Mechanism for prevention of neutron radiation in ion implanter beamlineFiled 2000·Granted Aug 19, 2003·21 cites·11 claims
- 0476US7875125B2Method for extending equipment uptime in ion implantationSEMEQUIP INC·Filed 2008·Granted Jan 25, 2011·2 cites·6 claims
- 0572US6137112ATime of flight energy measurement apparatus for an ion beam implanterEATON CORP·Filed 1998·Granted Oct 24, 2000·44 cites·24 claims
- 0671US6207964B1Continuously variable aperture for high-energy ion implanterAXCELIS TECH INC·Filed 1999·Granted Mar 27, 2001·48 cites·20 claims
- 0764US10324121B2Charge integration based electrostatic clamp health monitorAXCELIS TECH INC·Filed 2012·Granted Jun 18, 2019·2 cites·13 claims
- 0864US8502161B2External cathode ion sourceHAHTO SAMI K·Filed 2010·Granted Aug 6, 2013·2 cites·11 claims
- 0959US5218210ABroad beam flux density controlEATON CORP·Filed 1992·Granted Jun 8, 1993·21 cites·8 claims
- 1054US5023458AIon beam control systemEATON CORP·Filed 1990·Granted Jun 11, 1991·11 cites·12 claims
- 1149US2009183679A1Ion source gas reactorMCINTYRE EDWARD·Filed 2009·Application pending·0 cites
- 1239US10692749B2Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuckAXCELIS TECH INC·Filed 2017·Granted Jun 23, 2020·0 cites·20 claims
- 1337US9871473B2System and method for electrostatic clamping of workpiecesAXCELIS TECH INC·Filed 2015·Granted Jan 16, 2018·0 cites·18 claims
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