Inventor · disambiguated record
Derek John Witkowicki
Also filed as: WITKOWICKI DEREK · WITKOWICKI DEREK J · WITKOWICKI DEREK JOHN
13 granted patents·242 citations·filing 2014–2019
92Inventor score
Files withLAM RES CORP13
Top patents by PatentIndex Score
13 records- 0197US10062599B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2016·Granted Aug 28, 2018·30 cites·24 claims
- 0297US9881820B2Front opening ring podLAM RES CORP·Filed 2016·Granted Jan 30, 2018·124 cites·29 claims
- 0396US10124492B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2016·Granted Nov 13, 2018·25 cites·26 claims
- 0496US10062589B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·20 cites·19 claims
- 0596US10062590B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·23 cites·19 claims
- 0687US9698036B2Stacked wafer cassette loading systemLAM RES CORP·Filed 2015·Granted Jul 4, 2017·7 cites·20 claims
- 0786US10297480B2Buffer station with single exit-flow directionLAM RES CORP·Filed 2018·Granted May 21, 2019·4 cites·21 claims
- 0884US10427307B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2017·Granted Oct 1, 2019·3 cites·15 claims
- 0981US10304717B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2017·Granted May 28, 2019·2 cites·20 claims
- 1080US9881826B2Buffer station with single exit-flow directionLAM RES CORP·Filed 2014·Granted Jan 30, 2018·4 cites·20 claims
- 1163US10770339B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2019·Granted Sep 8, 2020·0 cites·20 claims
- 1245US10190865B2Verifying end effector flatness using electrical continuityLAM RES CORP·Filed 2016·Granted Jan 29, 2019·0 cites·18 claims
- 1328US10903065B2Halogen removal module and associated systems and methodsLAM RES CORP·Filed 2017·Granted Jan 26, 2021·0 cites·26 claims
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