Inventor · disambiguated record
Carolus Johannes Catharina Schoormans
Also filed as: SCHOORMANS CAROLUS JOHANNES CA · SCHOORMANS CAROLUS JOHANNES CATHARINA
12 granted patents·1 pending application·19 citations·filing 2004–2020
84Inventor score
Top patents by PatentIndex Score
13 records- 0182US10401735B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 3, 2019·2 cites·18 claims
- 0275US7557903B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 7, 2009·4 cites·8 claims
- 0372US10444635B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2017·Granted Oct 15, 2019·1 cites·15 claims
- 0467US7684011B2Calibration method for a lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Mar 23, 2010·2 cites·31 claims
- 0567US7102736B2Method of calibration, calibration substrate, and method of device manufactureASML NETHERLANDS BV·Filed 2004·Granted Sep 5, 2006·10 cites·36 claims
- 0662US10747120B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·0 cites·19 claims
- 0756US10712678B2Imprint lithography apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Jul 14, 2020·0 cites·9 claims
- 0851US2011001254A1Imprint Lithography Apparatus and MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 0947US11619886B2Position measurement system, interferometer system and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 4, 2023·0 cites·20 claims
- 1045US9606458B2Method for calibration of an encoder scale and a lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·0 cites·14 claims
- 1144US11940264B2Mirror calibrating method, a position measuring method, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Mar 26, 2024·0 cites·20 claims
- 1241US8330941B2Calibration method for a lithographic apparatusSCHOORMANS CAROLUS JOHANNES CATHARINA·Filed 2010·Granted Dec 11, 2012·0 cites·17 claims
- 1330US10088756B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted Oct 2, 2018·0 cites·23 claims
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