Inventor · disambiguated record
Wilhelm P. Platow
Also filed as: PLATOW WILHELM · PLATOW WILHELM P · PLATOW WILHELM PETER
17 granted patents·7 pending applications·91 citations·filing 2004–2025
93Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT10AXCELIS TECH INC4ADVANCED ION BEAM TECH INC2MORPHO DETECTION LLC2BUFF JAMES S1
Top patents by PatentIndex Score
24 records- 0192US9789434B1Systems and methods for gas pre-separation for detection of substancesMORPHO DETECTION LLC·Filed 2016·Granted Oct 17, 2017·14 cites·19 claims
- 0289US8809800B2Ion source and a method for in-situ cleaning thereofKOO BON-WOONG·Filed 2009·Granted Aug 19, 2014·11 cites·16 claims
- 0388US9530615B2Techniques for improving the performance and extending the lifetime of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Dec 27, 2016·9 cites·20 claims
- 0488US9142379B2Ion source and a method for in-situ cleaning thereofVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Sep 22, 2015·7 cites·11 claims
- 0584US7888662B2Ion source cleaning method and apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Feb 15, 2011·9 cites·20 claims
- 0683US7812321B2Techniques for providing a multimode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Oct 12, 2010·9 cites·12 claims
- 0780US7767986B2Method and apparatus for controlling beam current uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 3, 2010·5 cites·19 claims
- 0878US8003959B2Ion source cleaning end point detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·4 cites·11 claims
- 0978US7723697B2Techniques for optical ion beam metrologyVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 25, 2010·4 cites·17 claims
- 1074US8263944B2Directional gas injection for an ion source cathode assemblyKOO JOHN BON-WOONG·Filed 2008·Granted Sep 11, 2012·6 cites·16 claims
- 1172US8003956B2Method and apparatus for controlling beam current uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 23, 2011·3 cites·18 claims
- 1268US8466431B2Techniques for improving extracted ion beam quality using high-transparency electrodesBUFF JAMES S·Filed 2009·Granted Jun 18, 2013·3 cites·20 claims
- 1362US9269528B2Medium current ribbon beam for ion implantationADVANCED ION BEAM TECH INC·Filed 2014·Granted Feb 23, 2016·1 cites·14 claims
- 1460US9431247B2Method for ion implantationADVANCED ION BEAM TECH INC·Filed 2015·Granted Aug 30, 2016·1 cites·14 claims
- 1560US2025046563A1Magnetic focusing device low energy ion beamsAXCELIS TECH INC·Filed 2023·Application pending·0 cites
- 1658US2025259816A1Ion stripping apparatus and ion implantation system with selectable stripping gas sourceAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 1753US8912976B2Internal RF antenna with dielectric insulationPLATOW WILHELM P·Filed 2012·Granted Dec 16, 2014·1 cites·18 claims
- 1853US7413596B2Method and apparatus for the production of purified liquids and vaporsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Aug 19, 2008·4 cites·33 claims
- 1950US7397049B2Determining ion beam parallelism using refraction methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jul 8, 2008·0 cites·24 claims
- 2049US2023139138A1Charge filter magnet with variable achromaticityAXCELIS TECH INC·Filed 2021·Application pending·0 cites
- 2149US2021398772A1Tuning apparatus for minimum divergence ion beamAXCELIS TECH INC·Filed 2021·Application pending·0 cites
- 2241US2018172650A1Adsorption device for trace detectorsMORPHO DETECTION LLC·Filed 2016·Application pending·0 cites
- 2339US2011143527A1Techniques for generating uniform ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
- 2436US2018172635A1Methods and devices for moisture-based calibrationRAPISCAN SYSTEMS INC·Filed 2016·Application pending·0 cites
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