Inventor · disambiguated record

Yoh Tanaka

Also filed as: TANAKA YOH

1 granted patent·1 pending application·1 citations·filing 2009–2010

16Inventor score

Technology areasF16B H10P

Files withCANON ANELVA CORP1 TANAKA YOH1

Top patents by PatentIndex Score

2 records

0144US8303785B2Plasma processing apparatus and electronic device manufacturing methodTANAKA YOH·Filed 2010·Granted Nov 6, 2012·1 cites·7 claims
0242US2009283976A1Substrate holding apparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →