Inventor · disambiguated record
Zhefei J. Chen
Also filed as: CHEN ZHEFEI · CHEN ZHEFEI J · CHEN ZHEFEI JESSIE
6 granted patents·80 citations·filing 1997–2009
82Inventor score
Files withEKC TECHNOLOGY INC2DA NANOMATERIALS L L C1DUPONT AIR PROD NANOMATERIALS1LAM RES CORP1SMALL ROBERT J1
Top patents by PatentIndex Score
6 records- 0188US6367486B1Ethylenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal processEKC TECHNOLOGY INC·Filed 2000·Granted Apr 9, 2002·42 cites·21 claims
- 0259US6953391B1Methods for reducing slurry usage in a linear chemical mechanical planarization systemLAM RES CORP·Filed 2004·Granted Oct 11, 2005·8 cites·10 claims
- 0357US7037350B2Composition for chemical-mechanical polishing and method of using sameDA NANOMATERIALS L L C·Filed 2003·Granted May 2, 2006·8 cites·26 claims
- 0456US6492311B2Ethyenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal composition and processEKC TECHNOLOGY INC·Filed 1997·Granted Dec 10, 2002·18 cites·14 claims
- 0555US7524346B2Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substratesDUPONT AIR PROD NANOMATERIALS·Filed 2002·Granted Apr 28, 2009·4 cites·48 claims
- 0653US8142675B2Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methodsSMALL ROBERT J·Filed 2009·Granted Mar 27, 2012·0 cites·37 claims
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