Inventor · disambiguated record
Takehito Kudo
Also filed as: KUDO TAKEHITO
9 granted patents·7 pending applications·150 citations·filing 2005–2018
89Inventor score
Top patents by PatentIndex Score
16 records- 0198US7423731B2Illumination optical system, exposure apparatus, and exposure method with polarized switching deviceNIKON CORP·Filed 2005·Granted Sep 9, 2008·59 cites·58 claims
- 0297US7515248B2Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustmentNIKON CORP·Filed 2007·Granted Apr 7, 2009·25 cites·28 claims
- 0397US7446858B2Exposure method and apparatus, and method for fabricating deviceNIKON CORP·Filed 2005·Granted Nov 4, 2008·51 cites·43 claims
- 0489US9146474B2Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger and different linear polarization states in an on-axis area and a plurality of off-axis areasKUDO TAKEHITO·Filed 2009·Granted Sep 29, 2015·8 cites·42 claims
- 0585US8675177B2Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areasKUDO TAKEHITO·Filed 2007·Granted Mar 18, 2014·5 cites·19 claims
- 0675US7515247B2Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting deviceNIKON CORP·Filed 2007·Granted Apr 7, 2009·2 cites·30 claims
- 0768US2019137886A1Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areasNIKON CORP·Filed 2018·Application pending·0 cites
- 0865US9885959B2Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integratorNIPPON KOGAKU KK·Filed 2013·Granted Feb 6, 2018·0 cites·38 claims
- 0965US9678437B2Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference directionNIKON CORP·Filed 2013·Granted Jun 13, 2017·0 cites·32 claims
- 1063US2017146913A1Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areasNIKON CORP·Filed 2017·Application pending·0 cites
- 1163US2017248853A1Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areasNIKON CORP·Filed 2017·Application pending·0 cites
- 1258US9164393B2Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areasKUDO TAKEHITO·Filed 2007·Granted Oct 20, 2015·0 cites·28 claims
- 1358US2008239274A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2008·Application pending·0 cites
- 1458US2012236285A1Illumination optical system, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2012·Application pending·0 cites
- 1554US2010225895A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1654US2010149511A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →