Inventor · disambiguated record

Pär Mårten Lukas Broman

Also filed as: BROMAN PÄR MÅRTEN LUKAS

1 granted patent·11 citations·filing 2014–2014

36Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0190US10222701B2Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 5, 2019·11 cites·21 claims

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