Inventor · disambiguated record
Petrus Wilhelmus Josephus Maria Kemper
Also filed as: KEMPER PETRUS WILHELMUS JOSEPH · KEMPER PETRUS WILHELMUS JOSEPH MARIA · KEMPER PETRUS WILHELMUS JOSEPHUS MARIA
6 granted patents·118 citations·filing 2003–2012
84Inventor score
Top patents by PatentIndex Score
6 records- 0194US7586108B2Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detectorASML NETHERLANDS BV·Filed 2007·Granted Sep 8, 2009·56 cites·19 claims
- 0291US8138485B2Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detectorNIHTIANOV STOYAN·Filed 2008·Granted Mar 20, 2012·35 cites·29 claims
- 0381US8426831B2Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detectorNIHTIANOV STOYAN·Filed 2012·Granted Apr 23, 2013·6 cites·26 claims
- 0481US7170583B2Lithographic apparatus immersion damage controlASML NETHERLANDS BV·Filed 2005·Granted Jan 30, 2007·8 cites·25 claims
- 0576US7190437B2Wireless signaling in a lithographic apparatusASML NETHERLANDS BV·Filed 2003·Granted Mar 13, 2007·12 cites·19 claims
- 0654US7321416B2Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversionASML NETHERLANDS BV·Filed 2005·Granted Jan 22, 2008·1 cites·25 claims
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