Inventor · disambiguated record
Jason Plumhoff
Also filed as: PLUMHOFF JASON
5 granted patents·4 citations·filing 2004–2007
65Inventor score
Top patents by PatentIndex Score
5 records- 0166US7867403B2Temperature control method for photolithographic substratePLUMHOFF JASON·Filed 2007·Granted Jan 11, 2011·2 cites·20 claims
- 0249US7008877B2Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF biasUNAXIS USA INC·Filed 2004·Granted Mar 7, 2006·2 cites·36 claims
- 0344US8187483B2Method to minimize CD etch biasPLUMHOFF JASON·Filed 2007·Granted May 29, 2012·0 cites·16 claims
- 0439US7749400B2Method for etching photolithographic substratesPLUMHOFF JASON·Filed 2006·Granted Jul 6, 2010·0 cites·17 claims
- 0532US7625824B2Process change detection through the use of evolutionary algorithmsOERLIKON USA INC·Filed 2006·Granted Dec 1, 2009·0 cites·16 claims
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